Design, fabrication and testing of the P3 micro heat engine

Conference proceeding

Peer reviewed

S WHALEN, M THOMPSON, D BAHR, C RICHARDS and R RICHARDS

Sensors and actuators. A, Physical, Vol.104(3), pp.290-298

2003

Handle:

https://hdl.handle.net/2376/118221

Abstract

Electronics

Applied sciences

Micro- and nanoelectromechanical devices (mems/nems)

Exact sciences and technology

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

15 Record Views

Title: Design, fabrication and testing of the P3 micro heat engine
Creators: S WHALEN - School of Mechanical and Materials Engineering, Washington State University, P.O. Box 642920, Pullman, WA 99164-2920, United States
M THOMPSON - School of Mechanical and Materials Engineering, Washington State University, P.O. Box 642920, Pullman, WA 99164-2920, United States
D BAHR - School of Mechanical and Materials Engineering, Washington State University, P.O. Box 642920, Pullman, WA 99164-2920, United States
C RICHARDS - School of Mechanical and Materials Engineering, Washington State University, P.O. Box 642920, Pullman, WA 99164-2920, United States
R RICHARDS - School of Mechanical and Materials Engineering, Washington State University, P.O. Box 642920, Pullman, WA 99164-2920, United States
Publication Details: Sensors and actuators. A, Physical, Vol.104(3), pp.290-298
Academic Unit: Mechanical and Materials Engineering, School of
Publisher: Elsevier Science; Lausanne
Identifiers: 99900548117401842
Language: English
Resource Type: Conference proceeding