Conference proceeding
Development and testing of a MEMS piezoelectric energy harvester
Proceedings of SPIE, Vol.7288(1), pp.72880A-72880A-9
Active and Passive Smart Structures and Integrated Systems 2009
03/26/2009
Handle:
https://hdl.handle.net/2376/111804
Abstract
This paper presents a finite element analysis of an interdigitated (
) piezoelectric unimorph cantilever beam for harvesting vibration energy. The key feature that is analyzed is the poling behavior of the piezoelectric material. While simplified models of interdigitated piezoelectric devices assume some uniform and well-defined poling pattern, the finite element modeling shows that not to be the case. In this paper, a "percent poling factor" is developed with which to capture the real losses associated with non-uniform poling. A parametric study is carried out in which electrode patterns, piezoelectric layer dimensions and electrode dimensions are varied to see their effect on this percent poling factor. Optimal parameters are pointed out. Finally, experimental energy harvesting results for a micro-scale interdigitated beam are presented.
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Details
- Title
- Development and testing of a MEMS piezoelectric energy harvester
- Creators
- Ryan R Knight - Univ. of Pittsburgh (USA)Changki Mo - Univ. of Pittsburgh (USA)William W Clark - Univ. of Pittsburgh (USA)
- Publication Details
- Proceedings of SPIE, Vol.7288(1), pp.72880A-72880A-9
- Conference
- Active and Passive Smart Structures and Integrated Systems 2009
- Academic Unit
- Mechanical and Materials Engineering, School of
- Identifiers
- 99900547501901842
- Language
- English
- Resource Type
- Conference proceeding