Dissertation
Microstructural and geometric effects on the piezoelectric performance of PZT MEMS
Washington State University
Doctor of Philosophy (PhD), Washington State University
12/2007
DOI:
https://doi.org/10.7273/000005697
Abstract
The performance of a piezoelectric membrane in MEMS was evaluated for use in
power generation. An investigation was conducted to examine geometric and material
properties that influence the ability to strain a piezoelectric membrane. The amount of
strain and electrical energy produced by mechanically actuating the membrane revealed
insight to improve the amount of power produced by the piezoelectric element within the
membrane. The amount of deflection was the key influence to create biaxial strains of up to approximately 0.2%, above which membrane fracture tends to occur. This level of
strain was found to limit the coupling coefficient to 3% and the amount of RMS power
produced during dynamic operation to approximately 20 μW in an 8 mm membrane. In
order to achieve desired amounts of power for PZT MEMS device applications, the
operating conditions, piezoelectric membrane properties, and membrane geometry can be tailored. Each of these aspects are included in the developed predictive expressions for output power and the coupling coefficient, which are verified with experiment and
discussed in this dissertation.
Metrics
2 File views/ downloads
14 Record Views
Details
- Title
- Microstructural and geometric effects on the piezoelectric performance of PZT MEMS
- Creators
- Michelle Christina Robinson
- Contributors
- David F. Bahr (Chair)
- Awarding Institution
- Washington State University
- Academic Unit
- School of Mechanical and Materials Engineering
- Theses and Dissertations
- Doctor of Philosophy (PhD), Washington State University
- Publisher
- Washington State University
- Number of pages
- 208
- Identifiers
- 99901054763301842
- Language
- English
- Resource Type
- Dissertation