Thesis
A numerical study of nonlinear static and dynamic behavior of a square thin plate-membrane structure for application to a MEMS micro-generator
Master of Science (MS), Washington State University
2004
Handle:
https://hdl.handle.net/2376/257
Abstract
The behavior of geometrically nonlinear, laminated, piezoelectric, square platemembrane was predicted using a finite difference technique along with a step-by-step matrix analysis technique to predict the static and dynamic behavior. These methods were implemented using the FORTRAN 90 programming language, and then the developed program was used to optimize the plate-membrane for use in a micro-engine. Optimum performance is such that the membrane will exhibit low frequencies of operation to accommodate heat transfer in the micro-engine and that the majority of the energy into the system will be extracted through charge on a piezoelectric layer. In order to achieve this the model was exercised and it was found that minimization of residual stress and minimization of the other lamina thicknesses, besides the piezoelectric, can assist in both these goals. For typical silicon thicknesses (1-2 µm) it was found that the optimum PZT thickness based on a strain energy ratio is in the range of 2 to 3 µm. Also it was evident that an increase in side length will cause a decrease in frequency of vibration, and a decrease in deflection will reduce nonlinear effects therefore also reducing the frequency of vibration. The nonlinear behavior was also studied and harmonics were found and analyzed
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Details
- Title
- A numerical study of nonlinear static and dynamic behavior of a square thin plate-membrane structure for application to a MEMS micro-generator
- Creators
- Owen I. Crabtree
- Contributors
- Cecilia D. Richards (Degree Supervisor)
- Awarding Institution
- Washington State University
- Academic Unit
- Mechanical and Materials Engineering, School of
- Theses and Dissertations
- Master of Science (MS), Washington State University
- Identifiers
- 99900525275001842
- Language
- English
- Resource Type
- Thesis