Thesis
Analysis and modeling of capacitive MEMS gyroscopes with feedback control
Washington State University
Master of Science (MS), Washington State University
2010
Handle:
https://hdl.handle.net/2376/102974
Abstract
The fast development of MEMS gyroscopes requires the mass production of devices with high performance, high robustness, and low cost. MEMS devices have been traditionally analyzed using finite element method (FEM) and boundary element method (BEM). However, these methods have tradeoffs in time, skill level restrictions, and limitations on the scope of the design problem. One goal of this thesis is to investigate MEMS gyroscopes using system-level models which significantly accelerate the design process and improve the device performance. The 3D gyroscope models are generated based on mask layout and fabrication process restrictions. This practice reduces the number of prototyping cycles needed to complete the product design. Micro-fabrication imperfections and environmental variations lead to significant uncertainties of the performance of MEMS devices in mass production. This thesis also investigates compensator designs of resonant and non-resonant MEMS gyroscopes to provide robustness against structural and environmental parameter variations. The compensators are designed via the Linear Quadratic Regulator (LQR) technique in MATLAB. The closed-loop MEMS device performance is simulated using system-level models in CoventorWare. Simulation shows that the closed-loop gyroscope achieves high linearity, wide dynamic range, and high robustness. Our results demonstrate that LQR is an effective design to control MEMS gyroscopes and provides high robustness against fabrication imperfections.
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Details
- Title
- Analysis and modeling of capacitive MEMS gyroscopes with feedback control
- Creators
- Wei Cui
- Contributors
- Xiaolin Chen (Degree Supervisor)Wei Xue (Degree Supervisor)
- Awarding Institution
- Washington State University
- Academic Unit
- Electrical Engineering and Computer Science, School of
- Theses and Dissertations
- Master of Science (MS), Washington State University
- Publisher
- Washington State University; [Pullman, Washington] :
- Identifiers
- 99900525073701842
- Language
- English
- Resource Type
- Thesis