Thesis
Fabrication and characterization of MoS₂ chemical sensor
Washington State University
Master of Science (MS), Washington State University
05/2016
Handle:
https://hdl.handle.net/2376/100800
Abstract
Chemical and gas sensing devices are important for the environment, industry and public health. A pH sensor is one of the most widely used sensors to monitor pH levels in seawater, rivers, and lakes. Recently, Molybdenum Disulfide (MoS2) has been widely researched because of its unique physical, mechanical, and electrical properties. MoS2, in its atomically thin film from single layer to multi-layer, is highly sensitive to chemical and gas. In this thesis, investigation of MoS2 in chemical sensing, particularly in pH sensing, were conducted. The thesis primarily focuses on obtaining MoS2 crystals that are only a few layers thick using mechanical exfoliation technique, followed by the fabrication and testing of the MoS2 crystal as pH sensing device. Using the mechanical exfoliation technique, 2-layer to 4-layer MoS2 with sizes of 15 microns or larger were achieved. These samples were then fabricated into pH sensing devices using traditional micro-fabrication. The MoS2 pH sensors were tested under multiple conditions such as static, hysteresis, transient, temperature, and three terminals testing with different buffer pH solutions. The resistance of the MoS2 pH sensors decreased thus conductance increased with the increase of pH values. The 1.9nm MoS2 pH sensor achieved a sensitivity of 9.607 k[omega]/pH with a resolution of 0.87 pH for pH 3~6 and 0.154 pH for pH 8~10.
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Details
- Title
- Fabrication and characterization of MoS₂ chemical sensor
- Creators
- Quan Mihn Tran
- Contributors
- Feng Zhao (Chair)Tutku Karacolak (Committee Member) - Washington State University, Engineering and Computer Science (VANC), School ofJong-Hoon Kim (Committee Member) - Washington State University, Engineering and Computer Science (VANC), School of
- Awarding Institution
- Washington State University
- Academic Unit
- Electrical Engineering and Computer Science, School of
- Theses and Dissertations
- Master of Science (MS), Washington State University
- Publisher
- Washington State University; [Pullman, Washington] :
- Number of pages
- 74
- Identifiers
- 99900525112001842
- Language
- English
- Resource Type
- Thesis