Thesis
Synthesis of two-dimensional molybdenum disulfide atomic film by chemical vapor deposition
Washington State University
Master of Science (MS), Washington State University
05/2016
Handle:
https://hdl.handle.net/2376/101347
Abstract
This thesis is a summary of the synthesis of Molybdenum Disulfide (MoS2) Atomic thin films by the technique of Low Pressure Chemical Vapor Deposition (LPCVD).This technique to produce monolayer of MoS2, uniform, and larger area for mass production is the high demand for semiconductor technology. Other techniques such as mechanical exfoliation technique can only provide material at uncontrolled locations and is difficult to reproduce at nanometer scale. This thesis focuses on the synthesis of MoS2 thin film by LPCVD on Silicon (Si) or Silicon Oxidized (SiO2).The process steps to synthesize MoS2 are presented in detail and the fundamental mechanisms governing the growth is studied. In addition, crystal morphology and secondary of nucleation size are discussed. This thesis consists of five chapters. Chapter one explains the synthesis of two dimensional MoS2 thin film by Chemical Vapor Deposition using Molybdenum trioxide (MoO3) and disulfur (S2). Chapter two consists mainly of experimental work based on the theoretical reaction of MoS2, which is presented in the introduction of the processing technique. At the end of chapter two, the author introduces the successful of growth thin film MoS2 and presents the technique optimization of crystal triangular domains to 1.8 µm based on Atomic Force microscope (AFM) measurement and triangle crystal size. Chapter two also discusses in detail the experimental conditions used for growth and the literatures are reviewed on the relevant subject. In chapter three, the size of the triangular domain has been studied by different analytical models to verify the thin film MoS2 and crystal domains of MoS2. Chapter four focuses on modeling of N2 flow pattern in the reaction of S and MoO3. At the end of the thesis, Chapter five are summarized, and outlooks for the future prospects are discussed.
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Details
- Title
- Synthesis of two-dimensional molybdenum disulfide atomic film by chemical vapor deposition
- Creators
- Hung Duc Nguyen
- Contributors
- Feng Zhao (Chair)Jong Hoon Kim (Committee Member) - Washington State University, Engineering and Computer Science (VANC), School ofTutku Karacolak (Committee Member) - Washington State University, Engineering and Computer Science (VANC), School of
- Awarding Institution
- Washington State University
- Academic Unit
- Electrical Engineering and Computer Science, School of
- Theses and Dissertations
- Master of Science (MS), Washington State University
- Publisher
- Washington State University; [Pullman, Washington] :
- Number of pages
- 89
- Identifiers
- 99900525382901842
- Language
- English
- Resource Type
- Thesis