A two-dimensional electromechanical composite plate model for piezoelectric micromachined ultrasonic transducers (pMUTs)

Journal article

Peer reviewed

H. S CHOI, M. J ANDERSON, J. L DING and A BANDYOPADHYAY

Journal of micromechanics and microengineering, Vol.20(1), pp.015013-015013 (12)

2010

Handle:

https://hdl.handle.net/2376/108952

Abstract

Micromechanical devices and systems

Mechanical instruments, equipment and techniques

Mechanical engineering. Machine design

Exact sciences and technology

Microelectronic fabrication (materials and surfaces technology)

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Electronics

General

Applied sciences

Precision engineering, watch making

Physics

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

12 Record Views

Title: A two-dimensional electromechanical composite plate model for piezoelectric micromachined ultrasonic transducers (pMUTs)
Creators: H. S CHOI - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
M. J ANDERSON - Department of Mechanical Engineering, University of Idaho, Moscow, ID 83844, United States
J. L DING - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
A BANDYOPADHYAY - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
Publication Details: Journal of micromechanics and microengineering, Vol.20(1), pp.015013-015013 (12)
Academic Unit: Mechanical and Materials Engineering, School of
Publisher: Institute of Physics; Bristol
Identifiers: 99900547171001842
Language: English
Resource Type: Journal article