Characterization and modeling of a piezoelectric micromachined ultrasonic transducer with a very large length/width aspect ratio

Journal article

Peer reviewed

H. S CHOI, J. L DING, A BANDYOPADHYAY, M. J ANDERSON and S BOSE

Journal of micromechanics and microengineering, Vol.18(2), pp.025037-025037 (13)

2008

Handle:

https://hdl.handle.net/2376/105377

Abstract

Micromechanical devices and systems

Mechanical instruments, equipment and techniques

Mechanical engineering. Machine design

Exact sciences and technology

Microelectronic fabrication (materials and surfaces technology)

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Electronics

General

Applied sciences

Precision engineering, watch making

Physics

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

2 Record Views

Title: Characterization and modeling of a piezoelectric micromachined ultrasonic transducer with a very large length/width aspect ratio
Creators: H. S CHOI - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
J. L DING - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
A BANDYOPADHYAY - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
M. J ANDERSON - Department of Mechanical Engineering, University of Idaho, Moscow, ID 83844, United States
S BOSE - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
Publication Details: Journal of micromechanics and microengineering, Vol.18(2), pp.025037-025037 (13)
Academic Unit: Physics and Astronomy, Department of; Mechanical and Materials Engineering, School of
Publisher: Institute of Physics; Bristol
Identifiers: 99900546604601842
Language: English
Resource Type: Journal article