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Characterization of a vertically aligned silica nanospring-based sensor by alternating current impedance spectroscopy
Journal article   Peer reviewed

Characterization of a vertically aligned silica nanospring-based sensor by alternating current impedance spectroscopy

Yukta P TIMALSINA, Dennis ORIERO, Giancarlo CORTI, Timothy CANTRELL, Tej PRAKASH, Joshua BRAZEN, D. Eric ASTON, Kenneth NOREN, James J NAGLER, Shiva RASTOGI, …
Journal of micromechanics and microengineering, Vol.20(9), p.095005
2010
Handle:
https://hdl.handle.net/2376/117293

Abstract

Micromechanical devices and systems Mechanical instruments, equipment and techniques Mechanical engineering. Machine design Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Electronics General Applied sciences Precision engineering, watch making Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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