- Title
- Development of piezoelectric micromachined ultrasonic transducers
- Creators
- Firas AkashehTodd MyersJohn D FraserSusmita BoseAmit Bandyopadhyay
- Publication Details
- Sensors and actuators. A. Physical., Vol.111(2-3), pp.275-287
- Academic Unit
- Mechanical and Materials Engineering, School of
- Identifiers
- 99900548005301842
- Language
- English
- Resource Type
- Journal article
Journal article
Development of piezoelectric micromachined ultrasonic transducers
Sensors and actuators. A. Physical., Vol.111(2-3), pp.275-287
03/2004
Handle:
https://hdl.handle.net/2376/114148
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