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Efficiency of energy conversion for devices containing a piezoelectric component
Journal article   Peer reviewed

Efficiency of energy conversion for devices containing a piezoelectric component

Cecilia D RICHARDS, Michael J ANDERSON, David F BAHR and Robert F RICHARDS
Journal of micromechanics and microengineering, Vol.14(5), pp.717-721
2004
Handle:
https://hdl.handle.net/2376/106852

Abstract

Micromechanical devices and systems Mechanical instruments, equipment and techniques Mechanical engineering. Machine design Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Electronics General Applied sciences Precision engineering, watch making Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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