Journal article
MEMS interdigitated electrode pattern optimization for a unimorph piezoelectric beam
Journal of electroceramics, Vol.26(1), pp.14-22
06/2011
Handle:
https://hdl.handle.net/2376/108604
Abstract
This paper presents optimization of interdigitated (d
33
) piezoelectric MEMS unimorph cantilever beams for harvesting vibration energy or for tuning resonators. The analysis of the poling behavior of the piezoelectric material is the key feature. While it is common that simplified models of interdigitated piezoelectric devices assume some uniform and well-defined poling pattern, the finite element modeling used in this work shows that not to be the case. A percent poling factor is developed to investigate the real losses associated with non-uniform poling. A parametric study in terms of electrode patterns, piezoelectric layer dimensions, and electrode dimensions is carried out to examine their effect on the percent poling factor. Design guidelines are provided to help ensure that such piezoelectric MEMS devices are developed to obtain optimum energy harvesting or tuning performance.
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Details
- Title
- MEMS interdigitated electrode pattern optimization for a unimorph piezoelectric beam
- Creators
- Ryan Knight - Mechanical Engineering and Materials Science Department University of Pittsburgh Pittsburgh PA 15260 USAChangki Mo - School of Mechanical and Materials Engineering Washington State University-Tri-Cities 2710 Crimson Way Richland WA 99354 USAWilliam Clark - Mechanical Engineering and Materials Science Department University of Pittsburgh Pittsburgh PA 15260 USA
- Publication Details
- Journal of electroceramics, Vol.26(1), pp.14-22
- Academic Unit
- Mechanical and Materials Engineering, School of
- Publisher
- Springer US; Boston
- Identifiers
- 99900547113601842
- Language
- English
- Resource Type
- Journal article