Journal article
Microstructure and grain growth of polycrystalline silicon grown in fluidized bed reactors
Journal of crystal growth, Vol.311(6), pp.1496-1500
2009
Handle:
https://hdl.handle.net/2376/109569
Abstract
Fluidized bed technology is being implemented commercially to produce polycrystalline silicon that is used as a precursor for silicon ingot growth for the photovoltaic industry. The fluidized bed reactor produces polysilicon in a granular form, usually at lower temperatures than the traditional Siemens process. This current study documents for the first time grain growth and mechanical properties of polysilicon grown via a fluidized bed. In the as-grown state the granules produced by the fluidized bed reactor consist of equiaxed grains that are approximately 30
nm in diameter. Annealing at temperatures above 1000
°C causes significant grain growth to occur resulting in grains up to 300
nm. The hardness of the granular material was 10% less than that of single crystal silicon, which can be attributed to grain boundary sliding. Understanding the effect of annealing on microstructure, grain growth, and mechanical properties of the granules is critical for establishing appropriate techniques for handling the material.
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Details
- Title
- Microstructure and grain growth of polycrystalline silicon grown in fluidized bed reactors
- Creators
- M.M Dahl - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99163, United StatesA Bellou - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99163, United StatesD.F Bahr - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99163, United StatesM.G Norton - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99163, United StatesE.W Osborne - REC Silicon, Moses Lake, WA, United States
- Publication Details
- Journal of crystal growth, Vol.311(6), pp.1496-1500
- Academic Unit
- Mechanical and Materials Engineering, School of
- Publisher
- Elsevier B.V
- Identifiers
- 99900547354401842
- Language
- English
- Resource Type
- Journal article