Journal article
Modular Scanning Confocal Microscope with Digital Image Processing
PloS one, Vol.11(11), pp.e0166212-e0166212
2016
Handle:
https://hdl.handle.net/2376/104359
PMCID: PMC5102632
PMID: 27829052
Abstract
In conventional confocal microscopy, a physical pinhole is placed at the image plane prior to the detector to limit the observation volume. In this work, we present a modular design of a scanning confocal microscope which uses a CCD camera to replace the physical pinhole for materials science applications. Experimental scans were performed on a microscope resolution target, a semiconductor chip carrier, and a piece of etched silicon wafer. The data collected by the CCD were processed to yield images of the specimen. By selecting effective pixels in the recorded CCD images, a virtual pinhole is created. By analyzing the image moments of the imaging data, a lateral resolution enhancement is achieved by using a 20 × / NA = 0.4 microscope objective at 532 nm laser wavelength.
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Details
- Title
- Modular Scanning Confocal Microscope with Digital Image Processing
- Creators
- Xianjun Ye - Department of Physics and Astronomy, Washington State University, Pullman, WA 99164-2814, United States of AmericaMatthew D McCluskey - Department of Physics and Astronomy, Washington State University, Pullman, WA 99164-2814, United States of America
- Publication Details
- PloS one, Vol.11(11), pp.e0166212-e0166212
- Academic Unit
- Physics and Astronomy, Department of
- Publisher
- United States
- Identifiers
- 99900546803001842
- Language
- English
- Resource Type
- Journal article