Optimization of electromechanical coupling for a thin-film PZT membrane: I. Modeling

Journal article

Peer reviewed

J CHO, M ANDERSON, R RICHARDS, D BAHR and C RICHARDS

Journal of micromechanics and microengineering, Vol.15(10), pp.1797-1803

2005

Handle:

https://hdl.handle.net/2376/118208

Abstract

Micromechanical devices and systems

Mechanical instruments, equipment and techniques

Mechanical engineering. Machine design

Exact sciences and technology

Microelectronic fabrication (materials and surfaces technology)

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Electronics

General

Applied sciences

Precision engineering, watch making

Physics

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Optimization of electromechanical coupling for a thin-film PZT membrane: I. Modeling
Creators: J CHO - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
M ANDERSON - Department of Mechanical Engineering, University of Idaho, Moscow, ID 83844, United States
R RICHARDS - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
D BAHR - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
C RICHARDS - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
Publication Details: Journal of micromechanics and microengineering, Vol.15(10), pp.1797-1803
Academic Unit: Mechanical and Materials Engineering, School of
Publisher: Institute of Physics; Bristol
Identifiers: 99900547822501842
Language: English
Resource Type: Journal article