Power Output Force Generation by a MEMS Phase Change Actuator

Journal article

Peer reviewed

Leland W WEISS, Cill D RICHARDS and Robert F RICHARDS

Journal of microelectromechanical systems, Vol.20(6), pp.1287-1297

2011

Handle:

https://hdl.handle.net/2376/113187

Abstract

Micromechanical devices and systems

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

General

Mechanical instruments, equipment and techniques

Physics

Exact sciences and technology

11 Record Views

Title: Power Output Force Generation by a MEMS Phase Change Actuator
Creators: Leland W WEISS - College of Engineering and Science, Louisiana Tech University, Ruston, LA 71272, United States
Cill D RICHARDS - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
Robert F RICHARDS - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
Publication Details: Journal of microelectromechanical systems, Vol.20(6), pp.1287-1297
Academic Unit: Mechanical and Materials Engineering, School of
Publisher: Institute of Electrical and Electronics Engineers; New York, NY
Identifiers: 99900548599301842
Language: English
Resource Type: Journal article