The effect of design and process parameters on electromechanical coupling for a thin-film PZT membrane

Journal article

Peer reviewed

Omar AL-HATTAMLEH, Jeong CHO, Robert F RICHARDS, David F BAHR and Cecilia D RICHARDS

Journal of microelectromechanical systems, Vol.15(6), pp.1715-1725

2006

Handle:

https://hdl.handle.net/2376/113930

Abstract

Micromechanical devices and systems

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

General

Mechanical instruments, equipment and techniques

Physics

Exact sciences and technology

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Title: The effect of design and process parameters on electromechanical coupling for a thin-film PZT membrane
Creators: Omar AL-HATTAMLEH - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
Jeong CHO - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
Robert F RICHARDS - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
David F BAHR - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
Cecilia D RICHARDS - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164, United States
Publication Details: Journal of microelectromechanical systems, Vol.15(6), pp.1715-1725
Academic Unit: Mechanical and Materials Engineering, School of
Publisher: Institute of Electrical and Electronics Engineers; New York, NY
Identifiers: 99900548092301842
Language: English
Resource Type: Journal article