Titanium dioxide thin films for high temperature gas sensors

Journal article

Peer reviewed

Zachary Mark SEELEY, Amit BANDYOPADHYAY and Susmita BOSE

Thin solid films, Vol.519(1), pp.434-438

2010

Handle:

https://hdl.handle.net/2376/106546

Abstract

Structure and morphology; thickness

Exact sciences and technology

Condensed matter: structure, mechanical and thermal properties

Materials science

Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Thin film structure and morphology

Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)

Physics

Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids)

General equipment and techniques

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

General

Methods of deposition of films and coatings; film growth and epitaxy

Cross-disciplinary physics: materials science; rheology

11 Record Views

Title: Titanium dioxide thin films for high temperature gas sensors
Creators: Zachary Mark SEELEY - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164-2920, United States
Amit BANDYOPADHYAY - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164-2920, United States
Susmita BOSE - School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164-2920, United States
Publication Details: Thin solid films, Vol.519(1), pp.434-438
Academic Unit: Mechanical and Materials Engineering, School of
Publisher: Elsevier; Amsterdam
Identifiers: 99900547475701842
Language: English
Resource Type: Journal article